| 摘要 |
PURPOSE:To achieve a high-speed printing with a higher heat resistance by providing an NiCrSi based heat generating resistor on a heat resistant insulation substrate, an electrode metal across the heat generating resistor while a wear resistant layer on the surface of the resistor. CONSTITUTION:Ta2O5 is laminated on a heat resistant insulation substrate 1 coated with a glass glazed layer 2 by a sputtering to form a 0.5mum thick anti- corrosion layer 3 and then, after NiCrSi is laminated by sputtering to form a 0.3mum thick heat generating resistor 4, an Au layer 5b and a Cr layer 5c are deposited as an electrode metal body 5 at the thicknesses of 0.2mum, 1.5mum and 0.1mum respectively. Then, a pattern is applied by a photoetching the laminate body and then, Cr and the like laminated on the heat generating resistor 4 at the pattern section are photo-etched with respective etchants. In addition, a wear resistant layer 6 of Ta2O5 is formed in an area as shown by the alternate long and short dash line. |
