Process and apparatus for electrolytically regenerating an etchant

摘要

Figure 1 shows an etching machine 1 having three downstream rinsing components 11 to 13, into which fresh water is to be fed via a pipe 20 and from which the excess rinsing water is to be removed via a pipe 23. Connected to the sump 6 of the etching machine 1 via the pipes 33 and 42 is an electrolysis cell 27 which comprises a plurality of individual cells 24 to 26 and in which the etchant 7 enriched with dissolved copper is electrolytically regenerated. Likewise, individual electrolysis cells 52 in which the incoming rinsing water 17, also containing dissolved copper, is electrolytically treated are also connected in each case to the rinsing components 11 to 13. <IMAGE>