아크플라즈마 발생장치,申请号KR19830003254-传众专利搜索

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发明名称	아크플라즈마 발생장치
摘要	<p>내용 없음</p>
申请公布号	KR840005494(A)	申请公布日期	1984.11.14
申请号	KR19830003254	申请日期	1983.07.14
申请人	null, null	发明人	블라디미르 불카노빅
分类号	C23C14/32;C23C16/50;H01J37/32;H01L21/31	主分类号	C23C14/32
代理机构		代理人
主权项
地址

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