发明名称 VAPOR DEPOSITION DEVICE
摘要 PURPOSE:To improve the adhesion between a base body and a can and to cool uniformly the base body in the stage of running the base body on which a metal is deposited by evaporation along the circumferential surface of a can and cooling said body by impressing static electricity on the surface of the can. CONSTITUTION:A metal 9 is evaporated from a vapor source 8 and is deposited by evaporation on a belt-like base body 3 supplied from a feed roller 2. The body 3 is run on the circumferential surface of the can 5 and is cooled, after which the base body is taken up on a take-up roller 4. Static electricity is impressed via a plate 6 on the can 5 from a DC power source 7 so that the body 3 is brought into tight contact with the circumferential surface of the can 5. Failure in cooling a part of the body 3 is thus obviated, by which the damage is prevented and the vapor-deposited material is stuck more securely.
申请公布号 JPS59200754(A) 申请公布日期 1984.11.14
申请号 JP19830074568 申请日期 1983.04.27
申请人 HITACHI CONDENSER KK 发明人 MATSUZAKI SOUICHI;OSADA MINORU
分类号 C23C14/54;C23C14/56 主分类号 C23C14/54
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