| 摘要 |
PURPOSE:To form a black film which can maintain a black color for a long period of time by forming a film consisting essentially of TiO2 having high hardness and a color approximate to the color of NiC as backing on the material to be treated then depositing NiC thereon. CONSTITUTION:The inside of a vacuum treating chamber 1 is evacuated 12 to about 10<-5>-10<-6> Torr, and an evaporating material 4 which is Ti is evaporated by an electron gun part 2. A filament 8 is heated to about 2,000 deg.C and 50V positive voltage is impressed on an ionizing electrode 7 to ionize Ti to positive. A needle valve 11 is then opened to supply gaseous O2 to the inside of the chamber 1 to maintain 2X10<-4> Torr. After 0-500V negative voltage is impressed on a material 13 to be treated, a shutter 14 is opened and a negative voltage is impressed to the Ti ionized previously to positive to form a TiO2 film on the surface of the material 13. Crucibles 3, 6 are rotated and moved to position the crucible 6 contg. an evaporating material 5 which is Ni to above the part 2, and Ni is evaporated and ionized similarly as mentioned above to form NiC on the TiO2 film, thereby forming the black film. |
