发明名称 Process for the production of a capacitive hygrometer
摘要 The present invention relates to a process for producing a capacitive hygrometer, as well as to a hygrometer obtained by this process. Onto a conductive layer forming the first electrode is deposited a layer of a material with a dielectric constant varying as a function of the quantity of water absorbed. Onto the said dielectric material layer is then deposited a layer with a thickness exceeding 200 ANGSTROM of a slightly oxidizable metal, which forms the second electrode. The latter is made permeable to water by heat treatment at a temperature close to the softening temperature of the dielectric. Application to the measurement of the relative humidity of air.
申请公布号 US4482581(A) 申请公布日期 1984.11.13
申请号 US19820340732 申请日期 1982.01.19
申请人 COMMISSARIAT A L'ENERGIE ATOMIQUE 发明人 LORIN, ANDRE;ROSILIO, ANDRE;TANGUY, JEAN
分类号 G01N27/12;G01N27/22;(IPC1-7):B05D5/12;H01L7/00 主分类号 G01N27/12
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