发明名称 |
Process for the production of a capacitive hygrometer |
摘要 |
The present invention relates to a process for producing a capacitive hygrometer, as well as to a hygrometer obtained by this process. Onto a conductive layer forming the first electrode is deposited a layer of a material with a dielectric constant varying as a function of the quantity of water absorbed. Onto the said dielectric material layer is then deposited a layer with a thickness exceeding 200 ANGSTROM of a slightly oxidizable metal, which forms the second electrode. The latter is made permeable to water by heat treatment at a temperature close to the softening temperature of the dielectric. Application to the measurement of the relative humidity of air.
|
申请公布号 |
US4482581(A) |
申请公布日期 |
1984.11.13 |
申请号 |
US19820340732 |
申请日期 |
1982.01.19 |
申请人 |
COMMISSARIAT A L'ENERGIE ATOMIQUE |
发明人 |
LORIN, ANDRE;ROSILIO, ANDRE;TANGUY, JEAN |
分类号 |
G01N27/12;G01N27/22;(IPC1-7):B05D5/12;H01L7/00 |
主分类号 |
G01N27/12 |
代理机构 |
|
代理人 |
|
主权项 |
|
地址 |
|