| 摘要 |
PURPOSE:To obtain a tool, the quality a material thereof has high purity, mechanical strength thereof does not lower even at a high temperature and which has excellent creeping resistance at the high temperature, by constituting the tool by a wafer boat support section of a semicircular section consisting of the quality of a material of SiC and an arm section, one end thereof is fixed to the wafer boat support section. CONSTITUTION:A tool is constituted by a wafer boat support section 12 of a semicircular section composed of the quality of a material of SiC and arm section 11, one end thereof is fixed to the support section 12. The support section 12 of the semicircular section, which consists of the quality of the material such as the quality of the material of SiC of purity of 99.95wt% or higher and is impregnated with Si, is fixed integrally to the arm section 11 through a block 13, and the left end of the arm section 11 is fastened to one part 19 of a driving means. Bars such as two cartridge support bars 17 are mounted to the upper surface of the support section 12 in the longitudinal direction. |
