| 摘要 |
PURPOSE:To perform focusing of a short-wavelength laser light, whose wavelength is converted by a wavelength converter, automatically only with focusing of infrared laser rays of a pulse laser device by utilizing the fact that wavelengths of both lights are known. CONSTITUTION:In the state where a wavelength converter 7 is removed from the optical path, infrared laser rays for laser device alignment in a pulse laser device 11 is reflected by mirrors 4 and 5 and is focused on a target 10. The reflected light is received by a two-wavelength optical axis and focus error detector 58 to detect the variance of the beam optical axis, the angle of spread of the beam, and the positional variance of a condenser lens 3 and a target 10, and only angles of mirrors 4 and 5 and the position of the lens 3 are adjusted to adjust automatically mirrors and the lens with a correction quantity (calculated value) based on the difference of wavelength between the reflected light and infrared laser rays because the reflected light is the short-wavelength laser light. If a minute error exists still by insertion of the wavelength converter 7, they are further adjusted automatically. |
