摘要 |
PURPOSE:To enable high-sensitive measurement of thickness by applying a nature that a transmittance of infrared ray in a constant wave-length depends on energy strength. CONSTITUTION:As, even if a wave-length is kept constant, a coefficient of absorption of matter in a specific wave-length affects strength of luminescent infrared ray, the coefficient of absorption of luminescent infrared ray decreases when the energy is high and it increases if rthe energy is low. Consequently, in measurement of thickness, the optimum sensitive measurement becomes possible by wave length selection and energy strength selection for the optimum coefficient of transmittance. |