摘要 |
PURPOSE:To improve exhausting efficiency of luminance gas and remarkably curtail discharge period by continuously or intermittently supplying the helium gas from the one direction of sealed reservoir and then exhausting continuously the reservoir from the other direction. CONSTITUTION:The helium gas is supplied from the supply cylinder 7 into the discharge reservoir 1 and meanwhile the inside of reservoir 1 is always exhausted through the exhaust cylinder 8. The helium gas is continuously supplied or intermittently supplied immediately before or after the discharge between the electrodes 2 and 3. When the pressure in the reservoir 1 is kept, for example, at several tens of Torr to 100Torr by the supply of the helium gas, efficiency of exhaust system can be improved by ten and several times than the pressure of only the argon gas of 1Torr or less and thereby discharge period can be improved significantly. |