发明名称 SOFT X-RAY GENERATING APPARATUS
摘要 PURPOSE:To improve exhausting efficiency of luminance gas and remarkably curtail discharge period by continuously or intermittently supplying the helium gas from the one direction of sealed reservoir and then exhausting continuously the reservoir from the other direction. CONSTITUTION:The helium gas is supplied from the supply cylinder 7 into the discharge reservoir 1 and meanwhile the inside of reservoir 1 is always exhausted through the exhaust cylinder 8. The helium gas is continuously supplied or intermittently supplied immediately before or after the discharge between the electrodes 2 and 3. When the pressure in the reservoir 1 is kept, for example, at several tens of Torr to 100Torr by the supply of the helium gas, efficiency of exhaust system can be improved by ten and several times than the pressure of only the argon gas of 1Torr or less and thereby discharge period can be improved significantly.
申请公布号 JPS59198645(A) 申请公布日期 1984.11.10
申请号 JP19830072889 申请日期 1983.04.27
申请人 HITACHI SEISAKUSHO KK 发明人 WATANABE YOSHIO;ONO TETSUO;KATOU YASUO;MURAYAMA SEIICHI
分类号 H01J35/00;H01J35/22;H01L21/027;H05G2/00 主分类号 H01J35/00
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