| 摘要 |
PURPOSE:To well control membrane quality by keeping discharge current density on a specimen constant, by arranging an insulating tubular body around the cathode of a membrane forming apparatus utilizing glow discharge so as to bring the gap with the cathode to the half or less of the length of the cathode dark part. CONSTITUTION:Stock gas is introduced into a reaction container 1 through a supply mechanism 10 and maintained at predetermined pressure by an exhaust mechanism. In the next step, a power source 12 is closed and a current is supplied to a heater 5 to heat a specimen 4 while a power source 9 is closed to excite the glow discharge of the stock gas between a cathode 3 and an anode 8. By this method, a membrane is formed on the surface of the specimen 4 and, at the same time, a part of the formed active seed is diffused and adhered to the upper part of a second tubular body 13 but, because there is no continuity with the cathode 3, the development of negative glow is not generated. In addition, because the gap between the cathode 3 and the second tubular body 13 is brought to the half or less of the length of the cathode 3, the development of the active seed formed on the outer periperies of a support table 2 and a tubular body 7 to a conductive membrane is suppressed. |
