Method and apparatus for treating layers near the surface in workpieces made of electrically conducting material

摘要

A method and an apparatus are proposed which make it possible to dope the surface of comparatively irregularly shaped workpieces in a substantially uniform manner with plasma particles in order to thereby achieve a superficial hardening or enrichment of the surface with a particular substance. The method and the apparatus can be used equally for cleaning or for roughening the surface of the workpiece. The uniform effect on the workpiece surface is achieved by moving the workpiece at least intermittently during the ion bombardment.