| 摘要 |
PURPOSE:To prevent the generation of eddy currents on the passage of leakage flux, and to remove the partial heating of an electrostatic shielding by constituting the electrostatic shielding by a semiconductor material having resistivity of some extent. CONSTITUTION:A lead pipe 61 and an insulating pipe 9 are connected by a clamp 62, and an annular electrostatic shielding 64 is mounted at a connecting position of the insulating pipe 9 with the lead pipe 61. The electrostatic shielding 64 is constituted by a conductive rubber of approximately 10<-4>-10<6>mOMEGA resistivity as one of semiconductor materials. Accordingly, since the electrostatic shielding 64 is manufactured by the conductive rubber as a semiconductor, eddy currents are difficult to be generated by the electric resistance of the rubber even when leakage flux passes in the electrostatic shielding, and the partial heating of the electrostatic shielding can be suppressed. |
