| 摘要 |
PURPOSE:To obtain a magnetic sensor using an MR element with a limited deterioration due to heat stress by providing a conductive thin film for connecting a lead body at a specified part of a ferromagnetic thin film formed in a pattern on a substrate and additionally, a protective film thereon. CONSTITUTION:A substrate 2 of a sensor 1 taking the shape of a flat plate is made of a non-magnetic, electric insulation material such as various glasses, sapphire and ceramics at the thickness of 0.1-2mm.. A thin film 3 made of a ferromagnetic material such as Ni-Fe alloy of nickel, permalloy or the like is formed on the substrate 2 and the thickness is preferably 200-2,000Angstrom . This thin film comprises a detector section 31 and conductive sections 35 and 37 connected to conductive thin films 41 and 42 and the fine thread width of the detector section 31 is preferably 5-50mum. In addition, a protective film made of silicon nitride, silicon oxide or the like is formed thereon at the thickness of 200- 1,000Angstrom . Thus, a magnetic sensor can be obtained with an extremely limited characteristic deterioration. |
