| 摘要 |
PURPOSE:To make the most of an effect of which a yoke is mounted sufficiently, and to increase sensitivity by mutually arranging a ferromagnetic magnetoresistance effect thin-film (MR film) stripe and the yoke more ideally. CONSTITUTION:A conductor film 17, a first insulating layer 14, an MR film 12 consisting of an NiFe alloy or an NiCo alloy and a second insulating layer 15 are laminated on a substrate 11 composed of an Si board, a glass plate, a ceramic board or the like, and an MR film stripe pattern is formed through etching by using a mask. A high permeability magnetic film as a yoke 13 is plated while using a resist pattern 19 as a mask and the conductor 17 as a plating foundation. The MR film 12 and the yoke 13 are insulated electrically by a reattached insulating layer 16 formed during the etching of the stripe pattern. The MR film 12 and the yoke 13 are arranged precisely in the lateral direction, and a mutual space is determined by the thickness of the reattached insulating layer 16.
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