| 摘要 |
PURPOSE:To adjust the height of an oxide layer with high accuracy by tightly arranging a spraying magagine with a tapered mask hole on an insulating substrate and spraying oxide on the base metal and then scraping this oxide layer with a circular knife. CONSTITUTION:A spraying magagine 18 with a tapered mask hole 17 whose entrance cross-sectional shape is broadened is tightly arranged on a ceramic substrate 10. Then a spraying oxide jet from a nozzle is sprayed on a base metal 11 through the mask hole 17 of the spraying magazine 18 and oxide layers 19 with a dome-shaped cross section are formed. The ceramic substrate 10 is loaded on a vacuum chuck 20 and are secured on a reference level 21 when air is removed, as shown by an arrow. Subsequently, by prallelly moving a circular blade 23 mounted on a micrometer 22 in the arrow A direction along the surface of the ceramic substrate 10, the top of the oxide layers 19 is scraped and the height of the oxide layers 19 is adjusted with high accuracy. |
