| 摘要 |
PURPOSE:To make it possible to move a sample horizontally and vertically with no trouble even when a tilt angle of the sample is taken large by a method in which a double-or-triple axis is arranged coaxially about a tilt axis of a tilt substance while transmitting move by interposing a level between the end part on the optical axis side of more than one axis. CONSTITUTION:A sample vertically moving (Z-moving) stage 40 is provided on the tip part on the optical axis side of a tilt substance 35 through a linear guide 39 having a number of balls. A sample X-moving stage 42 is movably maintained in the X-axis direction on a Z-moving stage 40 through the linear guides 41a and 41b like the linear guide 39. When the Z-moving micrometer head 63 is rotated, the axis 54 moves in the Y-axis direction and thereby a lever 55 as well as a cylindrical axis 57 composing a double axis move in the same direction thus giving move in the Y-direction to a lever 58 contacted the end surface of the cylindrical axis 57. In this way, when the micrometer heads 60, 62 and 63 are optionally rotated, the sample 46 can move freely in the directions X, Y and Z thus enabling the scanning electron microscope observation of a desired part. |
