发明名称 |
External isolation module |
摘要 |
An external isolation module adapted to operatively interconnect at least one pair of a plurality of adjacent vacuum chambers through which a substrate travels and into which reaction materials are introduced. The external isolation module provides a passageway for the substrate between adjacent chambers while substantially preventing the diffusion of reaction materials from one of the chambers into the adjacent chamber. An accessible, environmentally-sealed, reaction material-isolating passageway is thereby formed.
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申请公布号 |
US4480585(A) |
申请公布日期 |
1984.11.06 |
申请号 |
US19830506960 |
申请日期 |
1983.06.23 |
申请人 |
ENERGY CONVERSION DEVICES, INC. |
发明人 |
GATTUSO, DAVID A. |
分类号 |
H01L31/04;C23C16/50;C23C16/511;C23C16/54;F16J15/16;H01L21/205;(IPC1-7):C23C13/10 |
主分类号 |
H01L31/04 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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