AMORPHOUS TELLURIUM-TUNGSTEN COMPOUND MATERIAL AND ITS MANUFACTURE

摘要

PURPOSE:To manufacture a novel amorphous Te-W compound material by mixing tellurium dioxide with tungsten dioxide so as to provide a composition having a specified ratio, melting the mixture by heating, and cooling the melt very rapidly. CONSTITUTION:TeO2 is mixed with WO3 so as to provide a composition represented by a formula (TeO2)1-x.(WO3)x (where 0.50>=x>0), and the mixture is heated at a temp. by about 50-200 deg.C above the melting temp. The heating is usually carried out in the air. The resulting melt is very rapidly cooled at about 10<4>- 10<6> deg.C/sec cooling rate to obtain a novel amorphous compound. This compound can be converted into an oriented polycrystalline thin film material by heat treating the compound at a temp. below the crystallization temp. for a prescribed time.