ACCUMULATED FILM FORMATION DEVICE

摘要

PURPOSE:To enable a uniform film to be stably formed on a base body by providing the cylindrical base body to the inside of a cylindrical reaction tank in allowing both axial cores to coincide with each other and providing the circular exhaust holes with the axial core as the center to the under part of the reaction tank. CONSTITUTION:A hanger member 4 is fixed to a base plate 3 of a cylindrical reaction tank 1 acting as a cathodic electrode and the hanger member 4 is constituted of both a discoid bearer supporter 7 and four pieces of leg members 8. a cylindrical electrically-conductive bearer 5 is provided on the supporter 7 in allowing the axial core to coincide nearly with the axial core of the reaction tank 1 and a cylindrical electricaly-conductive base body 6 is mounted on the bearer 5 in allowing both the axial cores to coincide with each other and the gap parts of the leg members 8 are made to the exhaust holes 9. An exhaust pipe 10 wherein the top end is widened in a horn-shape is provided to the hanger member 4, and a gas for forming an accumulated film which is introduced through the gas introduction pipes 17 is fed via plural gas introduction holes 15 uniformly distributed on the gas introduction pipes 14. Thereby the uniform accumulated film is formed without rotating the base body 6.