| 摘要 |
PURPOSE:To perfectly prevent reattachment of dust to a washed exposure mask by automatically housing the washed mask into a washed clean protective case for the mask. CONSTITUTION:An exposure mask washing device 1 comprises an exposure mask washing station 2, and a station 3, adjacent to it, for feeding and housing the exposure mask 5 and provided with cases 5, 6 for protecting the mask 5 from suspending dust. The case 4 housing the mask 5 to be washed is attached to the feed side of the station 3, and the empty case 6 washed in advance is attached to the housing side of the station 3. The mask 5 is carried automatically out of the case 4 with a conveyor to the washing station 2, after undergoing various kinds of washing treatments, again automatically carried, and housed in the case 6. |
