发明名称 CLAMPING SYSTEM AND LASER PROCESSING APPARATUS HAVING THE SAME
摘要 Disclosed are a clamping system and a laser processing apparatus having the same. The disclosed clamping system comprises: a vacuum plate loaded on a substrate; and a plurality of clamping units which fixates an edge part of the substrate wherein each of the clamping units includes a linear guide member formed to be reciprocated in a row with the vacuum plate; a cylinder connected to the linear guide member to vertically be moved; and a fixing part connected to the cylinder to vertically be moved, fixating the edge part of the substrate. As such, the present invention minimizes bending of the substrate.
申请公布号 KR20160103843(A) 申请公布日期 2016.09.02
申请号 KR20150026742 申请日期 2015.02.25
申请人 EO TECHNICS CO., LTD. 发明人 SEO, GI HONG;KO, YOUNG JUN
分类号 B23K26/70;B23K37/04 主分类号 B23K26/70
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