| 摘要 |
PURPOSE:To adjust the position and inclination of a parts without opening the inside of a vacuum case into the air by using a bellows enabled to be sealed in vacuum and moved, fixing the parts on the wall side of the vacuum case through the bellow sand operating the adjustment of the movement from the external of the case. CONSTITUTION:A rectangular plate-like 2nd flange 4 is connected to the upper surface (atmospheric side) of a flange 2 through the bellows 3. An opening 2a is sealed in vacuum by the bellows 3 and the flange 4. When the inside of the case 1 is evacuated up to vacuum, the 2nd flange 4 fixing a holding tool 5 is pressed to the vacuum case 1 side by vacuum force corresponding to an area decided by the effective diameter of the bellows 3. A part 6 fitted to the holding tool 5 can be driven into a prescribed position by adjusting bolts 9, 10 under said state. If the parts 6 is optically coupled with an optical system parts arranged in the case 1, the bolts 9, 10 are adjusted so that an output becomes a prescribed value on the basis of the output or the like of the optical system. |
