STRIPPING COMPOSITIONS AND METHODS OF STRIPPING RESISTS

摘要

STRIPPING COMPOSITIONS AND METHODS OF STRIPPING RESISTS Stripping compositions for removing resist materials from substrates comprise compositions of a 2-pyrrolidinone compound and a tetrahydrothiophene 1,1-dioxide compound. Either or both of polyethylene glycol and a diethylene glycol monoalkyl ether may be added to provide even more effective stripping compositions.