LIQUID DISCHARGING DEVICE, NANOIMPRINT DEVICE, LIQUID-CONTAINING TANK FOR NANOIMPRINT, METHOD FOR MANUFACTURING HARDENED MATERIAL PATTERN, METHOD FOR MANUFACTURING OPTICAL COMPONENT, METHOD FOR MANUFACTURING CIRCUIT BOARD, AND METHOD FOR MANUFACTURING IMPRINT MOLD

摘要

PROBLEM TO BE SOLVED: To suppress the increase in concentrations of metal impurities, particles, and water in a nanoimprint liquid contained in a containing part with time.SOLUTION: A liquid discharging device 1 comprises: a containing part 8 for containing a nanoimprint liquid 9; and a discharge opening 10 communicating with the containing part 8 and serving to discharge the nanoimprint liquid 9. The liquid discharging device 1 has, in the containing part 8, an adsorbing/absorbing body 23 for adsorbing or absorbing at least one kind selected from a group consisting of particles, metal ions and water. The liquid discharging device is arranged so that the adsorbing/absorbing body 23 is never discharged from the discharge opening 10 when discharging the nanoimprint liquid 9 from the discharge opening 10.SELECTED DRAWING: Figure 1