| 摘要 |
The invention comprises a high vacuum compatible electron beam stage having an X/Y and theta coordinate positioning drive mechanism mounted from below the stage. The stage comprises four plates: A base plate, an X plate slidably mounted thereon and constrained to slide in an X direction, a Y plate slidably mounted on the X plate and constrained to slide in a Y direction, and a theta plate mounted on the Y plate and constrained to translate in the Z direction. Two rotary capstans, mounted on drive shafts, are coupled on each to the X and Y plates by a metallic band looped around the capstan and attached at opposite ends to the plate. Rotation of the capstan causes the respective plates to slide in their constrained direction. The theta plate drive shaft is limited to vertical motion. The Y and theta drive shafts couple to universal joints. All three drive shafts couple to bellows joints. This permits the drive shafts to deflect at small angles. Each of the drive shafts couples through a rotary vacuum seal to drive motors mounted on a fixed platform exterior to the electron beam vacuum chamber. |
