| 摘要 |
PURPOSE:To obtain a composite target for forming a homogeneous alloy film on the surface of a substrate, by preparing a substrate from one metal material, and inlaying another metal material in cavities formed on the surface of said substrate so as to form a flush plane. CONSTITUTION:Circular cavities 11A are provided on the surface of a substrate 11 comprising one metal material by mechanical working or the like. Discs 12 comprising another metal material having shapes corresponding to said cavities 11A are tightly inserted in said cavities 11A in a manner such that the surface of the substrate 11 is made at the same level as those of the surfaces of the discs 12, to form a composite target. By performing sputtering using this target, a homogeneous alloy film is formed on the surface of a base plate. |
