| 摘要 |
PURPOSE:To increase the CI value of a crystal oscillator and to prevent the frequency variation of the oscillator due to a secular change, by using an alloy layer which is formed by a diffusing means between at least >=2 types of metallic thin films laminated on a crystal plate to form an electrode of the crystal oscillator. CONSTITUTION:A double structure of a chrome thin film (a) and a gold thin film (b) is secured for electrodes 3-10 of each crystal oscillation arm and pad parts X and Y respectively by forming a chrome thin film to a crystal plate on the face to be used as an electrode by a vapor deposition process, a sputtering process, etc. and then forming a gold thin film in the same way. Then a diffusion function is produced between metals with high-temperature processing under vacuum. Thus both metals of films (a) and (b) are alloyed. This alloyed metal has a lower level of hardness than the chrome itself and has a higher hardness than the gold itself. This prevents the increment of CI value as well as the increment of the frequency of a crystal oscillator owing to a secular change. |
