| 摘要 |
PURPOSE:To separate/communicate between a mirror body and a specimen carrying chamber in vacuum, by carrying a worked specimen while containing in a specimen carrying chamber under special ambient such as vacuum to an inclining system then inserting said specimen through the inclining system into the mirror body. CONSTITUTION:After working a specimen, the specimen holder 3 is contained in a space 22 of a specimen carrying chamber 19 through an operating rod 26, then a gate valve 25 is closed to leak a valve 27. Consequently said chamber 19 can be separated from a flange 18 of a vacuum deposition system. Then it is carried to an inclining system and fixed vacuum tightly through an O-ring 20 to the fixing section 16 of the inclining system. Thereafter it is evacuated through an exhaust hole at the side of inclining system or specimen carrying chamber and upon achieving predetermined vacuum in the space 21 and specimen holder insertion port 28, the gate valve 25 is opened to insert the specimen holder 3 into the insertion port 28.
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