| 摘要 |
PURPOSE:To obtain a material that extracts ion beams of elements with high melting point such as the B, Si, P, As, etc. with stability and long life by using a liquid metal ion type alloy with the composition expressed by a general formula NiaXb whose a and b are within the specified range, assuming X consists of two elements or more of B, Si, P, C, and As. CONSTITUTION:This liquid ion type alloy consists of three elements or more containing Ni and the total amount of two elements or more selected from a group consisting of B, Si, P, C, and As is supposed to reach 32-70at%. It is recommended that the two elements or more among the elements other than Ni should contain 1at%, respectively. In addition, the desirable additive elements are Si, P, and/or C for an Ni-B alloy, B, Si, and/or C for an Ni-P alloy, B for an Ni-Si alloy, and B, Si, P, and/or C for an Ni-As alloy. For the liquid metal ion type alloy mentioned above, the melting point is less than approximately 1,000 deg.C and an ion source with good characteristics and long life can be obtained.
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