| 摘要 |
PURPOSE:To attach a thin plate to a jig substrate with highly accurate degree of flatness by a method wherein a dispersion part consisting of a small-diametered hole part is provided on the part where the jig substrate will be mounted. CONSTITUTION:A plurality of small-diametered ring grooves 3 are provided along the circumferential direction on the upper part of the jig substrate 2, and the part where a thin plate mounting part 4 will be formed on the facial part surrounded by each groove 3 as the positioning part of the groove 3. On this mounting facial part, a dispersing part 8 consisting of a plurality of small- diametered hole parts 7 is provided. At this point, a bonding agent 6 is applied on the mounting facial part 4, and when the thin plate 5 placed thereon is pressurized using a pressurizing plate 11, the irregularity of bonding layer gennerating between the thin plate 5 and the mounting facial part 4 can be made uniform by having the engulfed air, the dust in the air and the like run out to the dispersing part 8, thereby enabling to reduce the undulation and to improve the flatness of the thin plate 5 after bonding. |
