| 摘要 |
PURPOSE:To shorten exposure time and improve the efficiency of transcription while improving the linear beam density of soft X-rays on an irradiation field without enlarging an internal between a soft X-ray generation source and the substrate side by interposing an irradiation surface of the rotary pair cathode among the focal points of an electron beam group having the maximum-and minimum momenta to be emitted from an electron gun. CONSTITUTION:When a crossing angle of a segment connecting the central point W0 of an irradiation field D and the irradiation surface 29 is to be an angle theta, the relation theta=alphaV<m> is satisfied so that the linear beam density of the outermost point W1 having the minimum linear beam density inside the irradiation field D can be made the maximum. However, alpha can be expressed: alpha=(1/60).(mu/rho).(A/Z).sintheta, while being defined by the quality of the material of the rotary pair cathode 28 and the crossing angle of an electron beam 9 and the irradiation surface 29. Further, V is to be the acceleration voltage of the electron beam 9:1.7<=2.0. Also the electron beam 9 includes an electron beam group 9L having the minimum momentum and an electron beam group 9H having the maximum momentum while these are focused on the different focusing poins FL and FH by an electron lens so as to be able to obtain the irradiation having the small focusing diameter and the high electron density by arranging the irradiation surface 29 of the rotary pair cathode 28 between the focal points FL and FH. |
