| 摘要 |
PURPOSE:To provide the titled etching soln. contg. an alkali dichromate, hydrochloric acid and acetic acid, giving a mirror-finished surface, and having high reproducibility in etching depth. CONSTITUTION:This etching soln. is an aqueous soln. contg. an alkali dechromate such as potassium dichromate or sodium dichromate, hydrochloric acid and acetic acid. When a crystal of a III-V group compound is etched with the etching soln., the formation of etching pits can be prevented, and a mirror-finished surface can be obtd. with high reproducibility in etching depth. The shape of the cross-section of the etched crystal is independent of the crystal orientation, so the etching soln. can be used well as an etching soln. for mesa etching.
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