| 摘要 |
PURPOSE:To enable the attachment and detachment of the probe card in a short time by reduced working steps by saving a probe card socket and a terminal pin on the probe card and further a setscrew for fixing the probe card. CONSTITUTION:For attachment and detachment of the probe card 6, a member 4 is firstly moved horizontally in a direction of the arrow B. Then a relay board 3 is pushed upward by a spring 11 and hopping pin 10b is also moved upward simultaneously. Nextly, the probe card 6 is slided along a stepped step 13 of a base plate 5 and proceeds in C-direction. When the member 4 is moved in A- direction under this condition, the relay board 3 is pressed downward to bring the hopping pin 10b in contact with an electrode 14 on an upper surface of the probe card 6 and further the pressure is applied to the probe card 6. That spring force fixes the probe card 6 to a base plate 5. |
