| 摘要 |
PURPOSE:To detect a shortcircuit between the first layer wirings easily by a method wherein the first layer wirings with an interval and the other first layer wiring intersecting with the former at the central part are formed on a substrate and when the first layer wirings with interval are connected to the second layer wiring with air bridge construction, the exposed parts of the intersected first layer wiring are provided with monitor patterns to check if the patterns and the second layer wiring are conductive with each other or not. CONSTITUTION:The first layer wirings 1 with an interval and the other first layer wiring 1 intersecting with the former are formed on a substrate 3 while the wirings 1 on both sides are connected with each other using the second wiring 2 with air bridge construction striding over the intersection. In such a construction, the exposed parts of the intersected central wiring 1 are provided with patterns 11 to check if the wirings 1 at both sides and the central wiring 1 intersecting with the former are shortcircuited with each other or not. Through these procedures, the conductivity between the patterns 11 and the wiring 2 may be tested to detect shortcircuit between the both side wirings and the intersecting wiring 1 easily. |
