| 摘要 |
PURPOSE:To prevent the production line from being interrupted by structural failure, by fabricating a plasma transmission pipe and a plasma shower pipe of stainless steel. CONSTITUTION:Microwaves generated in an oscillator 2 is led to a plasma generating furnace 6 through an isolator 3, a power monitor 4, a three-stub tuner 5, and a waveguide 8. Separately, a plasma-forming gas in a cylinder is fed through a pipe 9 to a plasma generating tube 7. The plasma generated in the furnace 6 and the tube 7 is led to a cross-shaped fluoroconnector 18 through a straight fluoroconnector 23 and a stainless plasma transmission pipe 25 and branched into directions A, B, and C. Then branched plasmas are fed to plasma inlets mounted on the vessel 1 through stainless plasma transmission pipes 26- A-C, and injected into a treatment chamber 12 from stainless shower pipes 10-1-3. |
