| 摘要 |
PURPOSE:To obtain stable polydihydrogensiloxane, by substituting carboxyl groups for the chloro groups in dichlorosilane and esterifying the product by the addition of an alcohol. CONSTITUTION:Dichlorosilane (H2SiCl2) gas is fed to a carboxylic acid solution kept at a low temperature to substitute the carboxyl groups for the chloro groups in dichlorosilane. An alcohol is added to the solution containing the substitution product to effect an esterification reaction and a polycondensation reaction of the silanol to obtain polydihydrogensiloxane. In this way, it becomes possible to obtain polydihydrogensiloxane in a stable form, which is unstable, otherwise, and to employ it as spacing elements of a semiconductor integrated circuit.
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