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经营范围
发明名称
SUBSTRATE BIAS PUMP.
摘要
申请公布号
EP0112357(A4)
申请公布日期
1984.10.25
申请号
EP19830902013
申请日期
1983.05.06
申请人
MOTOROLA, INC.
发明人
MORTON, BRUCE LEE;MOENCH, JERRY DALE
分类号
G05F3/20;(IPC1-7):H03K17/10;G05F1/64
主分类号
G05F3/20
代理机构
代理人
主权项
地址
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