摘要 |
PURPOSE:To inspect an end position of bodies to be detected through a simplified processing system by moving an image of the bodies to be detected which are arrayed linearly by a scanner, and processing detection signals of plural photoelectric converters. CONSTITUTION:The image of a body 2 to be detected which is lighted by a lighting device 1 is formed on the photoelectric converters 4a-4c through an image forming lens 3 and a galvanometer 6. This image scans on the photoelectric converters 4a-4c by driving the galvanometer 6 by a scanning signal from a controller 5. Detection signals P1-P3 of the photoelectric converters 4a-4c are converted by arithmetic circuits 7a and 7b into P1-P2 and P2-P3, and an arithmetic circuit 8 outputs (P1-P2)-(P2-P3). Then when a comparator 10 decides on whether the output value is larger than a set value Ea or smaller than a set value F, the scanning signal is outputted from a gate 9. The scanning signal is read by a sampling circuit 12 after being passed through an AND circuit 11 to output a position signal. |