| 摘要 |
PURPOSE:To enable sufficient scrubbing operation without affecting the influence to the size of a cavity even if a substrate has a large size by providing a notch at the end of a tapered surface formed on an essentioal part of a side wall. CONSTITUTION:A tapered surface 20 is formed on the side wall of a collet 17, and a notch 21 is formed at the end of the surface 20. The surface 20 is preferably guided when the collet 17 is directed downwardly and engaged with the recess 16 of an intermediate pocket 4 to facilitate positioning, and the notch 21 is formed to be no problem when the recess 16 of the pocket 4 is engaged with the surface 20 of the collet 17. A vacuum attracting hole 22 is formed at the center of the collet 17. The pellet 4 which is positioned by the pocket 4 using the collet 17 is attracted and moved upwardly, and when moved onto the mounting surface 8 of the pellet of the package 6 heated previously, it is moved down, and the prescribed load applied to bond to the bottom of the cavity 7. |
