LOCALIZED VACUUM PROCESSING APPARATUS,申请号GB19840023466-传众专利搜索

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发明名称	LOCALIZED VACUUM PROCESSING APPARATUS
摘要
申请公布号	GB8423466(D0)	申请公布日期	1984.10.24
申请号	GB19840023466	申请日期	1984.09.17
申请人	VARIAN ASSOCIATES INC	发明人
分类号	B01J3/00;H01J37/18;H01J37/317;H01L21/027	主分类号	B01J3/00
代理机构		代理人
主权项
地址

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