发明名称 Capacitatively coupled plasma device
摘要 A capacitatively coupled plasma device has a plasma tube, an electrode positioned near the tube and means to supply a high voltage, high frequency potential such as a radio frequency to the tube to energize a flow of argon or like gas to form a plasma. A sample of material is excited by the plasma energy to emit characteristic radiation for analysis by suitable means such as spectrometric analysis or for other use and application.
申请公布号 US4479075(A) 申请公布日期 1984.10.23
申请号 US19810327031 申请日期 1981.12.03
申请人 ELLIOTT, WILLIAM G. 发明人 ELLIOTT, WILLIAM G.
分类号 G01N21/73;H05H1/42;H05H1/46;(IPC1-7):H01J7/24;H05B31/26 主分类号 G01N21/73
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