发明名称 Magnetic sputtering anode reconditioning
摘要 A method for reconditioning an anode which has lost effectiveness as a result of the deposition of a dielectric material in a cathode sputtering process is disclosed, whereby the effectiveness of the anode is restored by depositing a conductive material over the dielectric material which has been deposited on the anode.
申请公布号 US4478700(A) 申请公布日期 1984.10.23
申请号 US19840571404 申请日期 1984.01.17
申请人 PPG INDUSTRIES, INC. 发明人 CRISS, RUSSELL C.
分类号 C23C14/34;(IPC1-7):C23C15/00 主分类号 C23C14/34
代理机构 代理人
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