| 摘要 |
PURPOSE:To form a clean room over a certain fixed area on a floor by means of air flow by a method wherein the blowing-off velocity of the air discharged from air blow-off ports, which cover the certain fixed area on the floor of a compartment, is made relatively faster than that of the air discharged from the remaining air blow-off ports. CONSTITUTION:The air fed to a dust D by means of a blower M is fed from air blow-off ports H to a compartment R after being purified by air filters F. The air foul with the dusts and the like generated in the compartment R is sucked through a grating floor G to under the floor by means of the blower M and then purified by the air filter 2 of the blower M and fed to the duct D again. In this case, the air blown-off after being accelerated by fan units U had velocities of 0.6-0.7m/s at the fringe of a line area W, of 0.3-0.5m/s at the central portion of the area W, and of 0-0.15m/s at the remaining area except the area W. Because of the blown-off air with said velocities, the air flow in the line area W is shut-off by the screen effect of the air flow flowing at the remaining area except the area W, resulting in forming a clean room on the line area W. |
