| 摘要 |
PURPOSE:To utilize effectively the capacity of a boat in the manufacture of an ingot of a III-V group compd. by a horizontal Bridgman method by inclining the boat charged with the III group compd. so that the leading and in the moving direction may be lower than the rear-end. CONSTITUTION:The III group element 1 is charged into a boat 2, and the Vgroup element 3 is charged into a boat 4. Both boats are sealed in the same sealing tube 5. While the sealed tube 5 is moved longitudinally in a furnace core tube 6 having a prescribed temp. distribution, the V group element 3 is vaporized 3 to react with the III group element 1, and the ingot of the III-V group compd. is manufactured. A stant 9 is provided to the bottom of the othr end opposite to the moving direction of the boat 2 to incline the boat 2 at 1-5 deg. to the level. Consequently, the liquid layer of the liquefied III group element becomes thicker in the moving direction of the boat 2, but the compd. is formed and solidified from the moving direction. Accordingly, as the compd. is formed, the liquid level of the III group element 1 is gradually elevated to make the thickness of the ingot uniform.
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