| 摘要 |
PURPOSE:To enable to easily obtain a laser light of good beam quality by a method wherein spacers of the same shape keeping electrode interval constant are provided at both ends between the electrodes. CONSTITUTION:The opposed surface of at least one electrode 2 of the electrodes 2 opposed to each other is covered with a dielectric 3, discharge is caused by impressing an AC voltage between the electrodes 2 in a gas flow, thus oscillating the laser light. The spacers 70 of the same shape keeping the interval of the electrodes 2 constant are provided at both ends between the electrodes 2 in such a device, for example, the spacer 70 is made of ceramic and has a hole corresponding to an aperture 7, which holes is coincident with the optical axis. Besides, the spacer 70 is composed of the first spacer part 71 keeping the electrode interval constant and a checking part 72 which checks to the side surface of the electrode 2 when the center of the aperture 7 comes coincident with the optical axis 9. |
