发明名称 DEVICE FOR INSPECTING INTEGRATED CIRCUIT
摘要 PURPOSE:To enable to largely shorten the working of evaluation in research and development by a method wherein the titled device is so constructed as to automatically point out a test object circuit DUT with the possibility of the existence of considerably many non-defective parts even when the DUT is defective. CONSTITUTION:The group 1 of drivers supplies a discriminating sign to discriminate the DUT, a series of testing patterns, and the expected values thereof. A testing pattern driver 5 receives the testing pattern through the group 3 of signal lines and impresses it via group 6 of signal lines to the input terminals of the DUT. The group 8 of receivers receives the group of response signals and then judges whether the signal level is over the fixed value or not. A judging circuit 10 judges agreement/disagreement by inputting the judged result 9 and the expected value signal 4 from the group 1 of drivers. A disagreement analyzing circuit 12 inputs a signal 11 for reporting the number of disagreement output terminals and thus analyzes the result of disagreement. A sign holding circuit 14 inputs the DUT discriminating sign signal 2 in said group 1 and the control signal 13 from said circuit 12 and then holds the DUT discriminating sign. A display device 16 displays the result 15 of disagreement analysis and the DUT discriminating sign.
申请公布号 JPS59184542(A) 申请公布日期 1984.10.19
申请号 JP19830058969 申请日期 1983.04.04
申请人 NIPPON DENKI KK 发明人 FUNATSU SHIGEHIRO
分类号 G01R31/26;G06F11/27;H01L21/66 主分类号 G01R31/26
代理机构 代理人
主权项
地址