| 摘要 |
PURPOSE:To obtain an unexpensive tilted element having a high diffraction efficiency by forming a light wave controlling electrode with a metallic material dispersed on a chalcogenide glass which is formed on an light guide. CONSTITUTION:The chalcogenide glass film 2 made of As2S3 is formed on a surface of a substrate 1 composed of LiNbO3. The light wave controlling electrode 3 is formed by dispersing Al to an electron beam irradiated part by irradiating the electron beam to the prescribed film 2. By constituting as described above, the light wave controlling electrode having a thickness same to that of the chalcogenide glass, at a minimum, and about twice widths as much as a spot diameter of the irradiated electron beam may be formed with a good accuracy. Thus, as a gap between the electrodes is decreased, the titled element having the high diffraction efficiency may be obtd. |
