| 摘要 |
PURPOSE:To enable the simultaneous inspection of a pinhole in distinction from a surface defect, by simple constitution wherein a reflective member such as a mirror is arranged in opposed relationship. CONSTITUTION:A sensor part 12 equipped with a laser beam emitting part and a beam receiving part for receiving reflected beam from a plate 1 to be inspected and a mirror 11 are arranged in opposed relation to each other so as to interpose the plate 1 to be inspected therebetween. In this case, weak reflected beam (a) due to interference in the defect part of the plate 1 to be inspected and strong reflected beam (b) through a pinhole and the mirror 11 are respectively received in good separability by the sensor part 12. By this mechanism, the pinhole can be simultaneously inspected in distinction from a surface defect by simple constitution. |
