| 摘要 |
PURPOSE:To obtain a highly accurate smooth surface by providing a groove on an insulation substrate parallel to a melted region and perpendicular to the direction of the advancing of the melted region. CONSTITUTION:A groove 4 is provided to an insulation substrate 1 and an amorphous silicon film 5 is formed on it. When the surface is scanned by an electron beam to the direction of an arrow, the final swollen part drops into the groove 4 and the convex part is eliminated so that an Si crystal film 6 with a smooth surface can be obtained. |
